Investigation on Sige Selective Epitaxy for Source and Drain Engineering in 22 Nm CMOS Technology Node and Beyond

Investigation on Sige Selective Epitaxy for Source and Drain Engineering in 22 Nm CMOS Technology Node and Beyond

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პირველად გამოქვეყნდა: 2020
გამომცემლები: Springer Singapore Pte. Limited

წიგნები

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